Description
Micro-Electro-Mechanical System technology is invading in all the applications such as automobile, medical, consumer products and weapon systems. Design of a sensor based on MEMS technology involves complex large number of steps and many variables. This book gives insight on predictive design technique for sensor design.The book also discusses two innovative techniques for optimizing performance of micro-acceleration sensor. This book will be useful to learners of course on MEMS.













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